Измерительная система Keyence VK-X1000

controller

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Model	VK-X1000
Type	controller
Total magnification	Up to 28,800 x*1
Field of view (minimum range)	11 to 7,398 µm
Frame rate (laser measurement speed)	4 to 125 Hz, 7,900 Hz*2
Measurement principle	Optical system	Pinhole confocal optical system, Focus variation
Light-receiving element	16-bit sensing: photomultiplier, High-definition colour CMOS
Scanning method (during general measurement and image stitching)	Automatic upper/lower limit setting, rapid laser light intensity setting (AAGII) , automatic detection and rescanning in case of poor reflection (double scan)
Height measurement	Display resolution	0.5 nm (VK-X1100) , 5 nm (VK-X1050)
Linear scale
Dynamic range	16 bits
Repeatability ?	Laser confocal	20 x, 40 nm; 50 x, 12 nm (VK-X1100) 20 x, 40 nm; 50 x, 20 nm (VK-X1050)
Focus variation	5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 20 nm (VK-X1100) 5 x, 500 nm; 10 x, 100 nm; 20 x, 50 nm; 50 x, 30 nm (VK-X1050)
Height data acquisition range	0.7 million steps
Accuracy	0.2 + L /100 µm or better*3
Width measurement	Display resolution	1 nm (VK-X1100) , 10 nm (VK-X1050)
Repeatability 3?	Laser confocal	20 x, 100 nm; 50 x, 40 nm (VK-X1100) 20 x, 100 nm; 50 x, 50 nm (VK-X1050)
Focus variation	5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 50 nm (VK-X1100) 5 x, 400 nm; 10 x, 400 nm; 20 x, 120 nm; 50 x, 65 nm (VK-X1050)
Accuracy	±2 %*3
XY stage configuration	Manual: Moving range	70 mm x 70 mm
Motorised: Moving range	100 mm x 100 mm
Observation	Image options	High-definition colour CMOS image 16-bit laser colour confocal image Confocal optical system with ND filter C-laser DIC image (differential interference image)
Illumination	Ring illumination, coaxial illumination
Laser light source for measurements	Wavelength	Violet semiconductor laser, 404 nm (VK-X1100) Red semiconductor laser, 661 nm (VK-X1050)
Maximum output power	1 mW
Laser class	Class 2 laser product (IEC60825-1)
Power supply	Power voltage	100 to 240 VAC, 50/60 Hz
Current consumption	150 VA
Weight	Approx. 3.0 kg
1 23 inch full-screen display. 2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. *3 When measuring a standard sample (standard scale) with a 20 x objective lens (or higher).