| Model | VK-X150K | |
| Total magnification | Up to 19200?*1 | |
| Field of view (minimum range) | 16 to 5400 µm | |
| Frame rate | Laser measurement speed | 4 to 120 Hz, 7,900 Hz*2 |
| Measurement principles | Optical system | Pinhole confocal optical system |
| Height measurement | Linear scale | 5 nm |
| Repeatability ? | 20?: 40 nm, 50?: 20 nm, 100?: 20 nm *3 | |
| Memory for Z-axis measurement | 1.4 million steps | |
| Accuracy | 0.2 + L/100 µm or better*4*5 | |
| Width measurement | Display resolution | 10 nm |
| Repeatability 3? | 20?: 100 nm, 50?: 50 nm, 100?: 30 nm*3 | |
| Accuracy | ±2%*3 | |
| XY stage configuration | Manual: Operating range | 70 mm?70 mm |
| Motorized: Operating range | 50 ? 50 mm, 100 ? 100 mm*6 | |
| Observation | Maximum capture resolution | 3072?2304 |
| Weight | Microscope | Approx. 25 kg (without sensor head, approx. 8.5 kg) |
| Controller | Approx. 11 kg | |
| *1 With a 23-inch monitor. *2 At maximum speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan is within a measurement pitch of 0.1 µm. *3 When measuring the reference scale with the 20? objective lens (or higher) at an ambient temperature of 20 ± 2 °C. With the exception of the VK-X120/X130 with the 100? objective lens. *4 When measuring the reference scale with the 20x objective lens (or higher) at an ambient temperature of 20 ±2 °C. With the e x ception of the VK-X120/X130 with the 100x objective lens. *5 L = Vertical measurement length in µm *6 With a motorised stage. |
Измерительная система Keyence VK-X150K
Controller
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