| Model | VR-3200 | |||
| Type | Head | |||
| Applicable controller | VR-3000K | |||
| Field-of-view | Wide-field mode | Magnification on a 15″ monitor 12x |
Horizontal | 24 mm |
| Vertical | 18 mm | |||
| Magnification on a 15″ monitor 25x |
Horizontal | 12 mm | ||
| Vertical | 9 mm | |||
| Magnification on a 15″ monitor 38x |
Horizontal | 8 mm | ||
| Vertical | 6 mm | |||
| Magnification on a 15″ monitor 50x |
Horizontal | |||
| Vertical | 4.5 mm | |||
| High magnification mode | Magnification on a 15″ monitor 40x |
Horizontal | 7.6 mm | |
| Vertical | 5.7 mm | |||
| Magnification on a 15″ monitor 80x |
Horizontal | 3.8 mm | ||
| Vertical | 2.9 mm | |||
| Magnification on a 15″ monitor 120x |
Horizontal | 2.5 mm | ||
| Vertical | 1.9 mm | |||
| Magnification on a 15″ monitor 160x |
Horizontal | |||
| Vertical | 1.4 mm | |||
| Zoom | 1x to 4x | |||
| Measurement accuracy |
Height measurement | ±3 µm*1 | ||
| Width measurement | Wide-field mode: ±5 µm, High magnification mode: ±2 µm*1 | |||
| Stitching function | Full automatic (XY stage automatic control + auto focus) measurement*2 Auto adjustment, Auto template analysis*2 |
|||
| Stage | Z stroke | 90 mm (electric) | ||
| Rotation | ±180°(sample rotating stage) | |||
| Tilt | ±30° or more | |||
| Working distance | 75 mm | |||
| Image receiving element | 4 megapixel monochrome CMOS | |||
| Transmitter lens | Double telecentric lens x2 | |||
| Receiver lens | Double telecentric lens | |||
| Light sources | Observation light source | LED ring light (red, green, blue) | ||
| Measurement light source | White LED | |||
| Image size | 1024 x 768 pixels, 2048 x 1536 pixels | |||
| Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz | ||
| Power consumption | 150 VA | |||
| Environmental resistance | Ambient temperature | +15 to +30 °C | ||
| Relative humidity | 35 to 80 % RH (No condensation) | |||
| Weight | 28.0 kg | |||
| *1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C). *2 The stitching module (VR-H2J) is required. |
Измерительная система Keyence VR-3200
Wide-Area 3D Measurement System Macroscope Head
Описание
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