| Model | IM-7030 | |
| Type | Head Wide stage model incorporating programmable ring-illumination/light probe unit |
|
| Image sensor | 1” 6.6 mega pixel monochrome CMOS | |
| Display | 10. 4” LCD monitor (XGA: 1024 ? 768) | |
| Receiver lens | Double telecentric lens | |
| Image measurement | Field of view | Wide-field measurement mode: 300 mm ? 200 mm (4? R50) High-precision measurement mode: 225 ? 125 mm |
| Minimum display unit | 0.1 µm | |
| Repeatability | W/o stage movement | Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm |
| With stage movement | Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm |
|
| Measurement accuracy (±2?) | W/o binding | Wide-field measurement mode: ±5 µm*1 High-precision measurement mode: ±2 µm*2 |
| With binding | Wide-field measurement mode: ±(7 + 0.02 L) µm*3 High-precision measurement mode: ± (4 + 0.02 L) µm*4 |
|
| Light probe Measurement | Measurable area (XY) | 190 ? 90 mm |
| Maximum measurement depth | 30 mm | |
| Light probe diameter | o3 mm | |
| Measuring force | 0.015 N | |
| Repeatability | ±2 µm*5 | |
| Measurement accuracy | ±(8 + 0.02 L) µm*6 | |
| External remote input | Non-voltage input (with and without contact) | |
| External output | OK/NG/FAIL/MEAS. | PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower |
| Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
| USB 2.0 series A | 6 ports (front: 2, rear: 4) | |
| Record | Hard disk drive | 500 GB |
| Illumination system | Transparent | Telecentric transparent illumination |
| Ring | Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric) |
|
| XY stage | Moving range | 200 ? 100 mm (electric) |
| Withstand load | 7.5 kg | |
| Z stage | Moving range | 75 mm (electric) |
| Power supply | Power voltage | 100–240 VAC, 50/60 Hz |
| Current consumption | 430 VA or lower | |
| Environmental resistance | Operating ambient temperature | +10°C to 35°C |
| Operating ambient humidity | 20% RH to 80% RH (no condensation) | |
| Weight | Approx. 33 kg | |
| *1 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *2 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *3 In the range of 280 ? 180 mm (4? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of 220 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) *5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm *6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm. |
Измерительная система Keyence IM-7030
Measurement Head
Описание
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