Model	IM-7020
Type	Head Model incorporating backlighting/programmable ring-illumination unit/light probe unit
Image sensor	1” 6.6 mega pixel monochrome CMOS
Display	10. 4” LCD monitor (XGA: 1024 ? 768)
Receiver lens	Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode: 200 mm ? 200 mm (4 ? R50) High-precision measurement mode: 125 ? 125 mm
Minimum display unit	0.1 µm
Repeatability	W/o stage movement	Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm
With stage movement	Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm
Measurement accuracy (±2?)	W/o binding	Wide-field measurement mode: ±5 µm1 High-precision measurement mode: ±2 µm2
With binding	Wide-field measurement mode: ± (7 + 0.02 L) µm3 High-precision measurement mode: ± (4 + 0.02L) µm4
Light probe Measurement	Measurable area (XY)	90 ? 90 mm
Maximum measurement depth	30 mm
Light probe diameter	o3 mm
Measuring force	0.015 N
Repeatability	±2 µm*5
Measurement accuracy	± (8 + 0.02 L) µm*6
External remote input	Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.	PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower
Interface	LAN	RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 series A	6 ports (front: 2, rear: 4)
Record	Hard disk drive	500 GB
Illumination system	Transparent	Telecentric transparent illumination
Ring	Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
XY stage	Moving range	100 ? 100 mm (electric)
Withstand load	5 kg
Z stage	Moving range	75 mm (electric)
Power supply	Power voltage	100 to 240 VAC 50/60 Hz
Power consumption	430 VA or lower
Environmental resistance	Pollution degree	2
Overvoltage category	II
Ambient temperature	+10 to +35 °C
Relative humidity	20 to 80 % RH (No condensation)
Weight	Approx. 31 kg
1 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position 2 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position 3 In the range of 180 ? 180 mm (4 ? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) 4 In the range of 120 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) 5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm 6 When the detection system is standard, and the ambient temperature is 23°C ±1°C, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ± (10 + 0.02 L) µm with L as the measurement length in mm.

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Измерительная система Keyence OP-88019

Измерительная система Keyence IM-7020

Measurement Head

Описание
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Описание

Model	IM-7020
Type	Head Model incorporating backlighting/programmable ring-illumination unit/light probe unit
Image sensor	1” 6.6 mega pixel monochrome CMOS
Display	10. 4” LCD monitor (XGA: 1024 ? 768)
Receiver lens	Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode: 200 mm ? 200 mm (4 ? R50) High-precision measurement mode: 125 ? 125 mm
Minimum display unit	0.1 µm
Repeatability	W/o stage movement	Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm
With stage movement	Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm
Measurement accuracy (±2?)	W/o binding	Wide-field measurement mode: ±5 µm1 High-precision measurement mode: ±2 µm2
With binding	Wide-field measurement mode: ± (7 + 0.02 L) µm3 High-precision measurement mode: ± (4 + 0.02L) µm4
Light probe Measurement	Measurable area (XY)	90 ? 90 mm
Maximum measurement depth	30 mm
Light probe diameter	o3 mm
Measuring force	0.015 N
Repeatability	±2 µm*5
Measurement accuracy	± (8 + 0.02 L) µm*6
External remote input	Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.	PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower
Interface	LAN	RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 series A	6 ports (front: 2, rear: 4)
Record	Hard disk drive	500 GB
Illumination system	Transparent	Telecentric transparent illumination
Ring	Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
XY stage	Moving range	100 ? 100 mm (electric)
Withstand load	5 kg
Z stage	Moving range	75 mm (electric)
Power supply	Power voltage	100 to 240 VAC 50/60 Hz
Power consumption	430 VA or lower
Environmental resistance	Pollution degree	2
Overvoltage category	II
Ambient temperature	+10 to +35 °C
Relative humidity	20 to 80 % RH (No condensation)
Weight	Approx. 31 kg
1 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position 2 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position 3 In the range of 180 ? 180 mm (4 ? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) 4 In the range of 120 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) 5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm 6 When the detection system is standard, and the ambient temperature is 23°C ±1°C, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ± (10 + 0.02 L) µm with L as the measurement length in mm.

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Категория: Измерительные системы