| Model | VHX-S15CE | |
| Motor | 5-phase stepping motor | |
| Positioning accuracy | 6 µm*1 | |
| Repeatability | ±0.5 µm*1 | |
| Stage stroke distance | 15 mm | |
| Resolution | 0.05 µm/pulse | |
| Load capacity | 5 kg | |
| Rating | Power voltage | 100 to 240 VAC, 50/60 Hz |
| Power consumption | 70 VA | |
| Environmental resistance | Ambient temperature | +5 to +40 °C |
| Relative humidity | 35 to 80 % RH (No condensation) | |
| Weight | Controller: 3 kg | |
| *1 Positioning accuracy and repeatability specifications apply to the motorised stage |
Микроскоп Keyence VHX-S15CE
3D Auto Measurement Unit (Controller)
Описание
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