Микроскоп Keyence VR-5200

Wide-Area 3D Measurement System Head

Описание
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Model	VR-5200
Type	Head
Controller	VR-5000
Field-of-view	Low magnification (wide field of view)	Magnification on a 15″ monitor 12?	Horizontal	24.0 mm
Vertical	18.0 mm
Magnification on a 15″ monitor 25?	Horizontal	12.0 mm
Vertical	9.0 mm
Magnification on a 15″ monitor 38?	Horizontal	8.0 mm
Vertical	6.0 mm
Magnification on a 15″ monitor 50?	Horizontal
Vertical	4.5 mm
High magnification (high resolution)	Magnification on a 15″ monitor 40?	Horizontal	7.6 mm
Vertical	5.7 mm
Magnification on a 15″ monitor 80?	Horizontal	3.8 mm
Vertical	2.9 mm
Magnification on a 15″ monitor 120?	Horizontal	2.5 mm
Vertical	1.9 mm
Magnification on a 15″ monitor 160?	Horizontal
Vertical	1.4 mm
Zoom	1? to 4?
Height measurement	Display resolution	0.1 µm
Height measurement range	Without Z stitching	Low magnification (wide field of view) : 10 mm High magnification (high resolution) : 1 mm
With Z stitching	Low magnification (wide field of view) : 50 mm High magnification (high resolution) : 30 mm
Repeatability (?)	Without Z stitching	0.4 µm*1
With Z stitching	1.0 µm*1
Measurement accuracy	Without Z stitching	±2.5 µm*1
With Z stitching	±4.0 µm*1
Width measurement	Repeatability (?)	Low magnification (wide field of view) : 1 µm High magnification (high resolution) : 0.5 µm *1
Measurement accuracy	Low magnification (wide field of view) : ±5 µm High magnification (high resolution) : ±2 µm *1
Stitching function	Fully-automated measurement (XY automatic control + Z automatic control) , Automatic mapping creation, Automatic area setting*2
XY measurable range	206 x 104 mm*2
Stage	XY stroke	184 x 88 mm (motorised)
Z stroke	73 mm (motorised)
Load capacity	4.5 kg
Working distance	75 mm
Image receiving element	4 megapixel monochrome CMOS
Transmitter lens	Double-telecentric lens x 2
Receiver lens	Double-telecentric lens
Light sources	Observation light source	LED ring light (red, blue, green)
Measurement light source	White LED
Data processing	Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)
Power supply	Power voltage	100 to 240 VAC, 50/60 Hz
Power consumption	200 VA max.
Environmental resistance	Operating ambient temperature	+15 to 30 °C
Operating ambient humidity	35 to 80 % RH (no condensation)
Weight	Approx. 28 kg*3
1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C ) 2 Measurement expansion module (VR-H3J) required *3 Weight of only measurement unit: Approx. 11 kg

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